JPH0338835Y2 - - Google Patents
Info
- Publication number
- JPH0338835Y2 JPH0338835Y2 JP11515285U JP11515285U JPH0338835Y2 JP H0338835 Y2 JPH0338835 Y2 JP H0338835Y2 JP 11515285 U JP11515285 U JP 11515285U JP 11515285 U JP11515285 U JP 11515285U JP H0338835 Y2 JPH0338835 Y2 JP H0338835Y2
- Authority
- JP
- Japan
- Prior art keywords
- leak
- suction
- wafer
- groove
- support surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 44
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11515285U JPH0338835Y2 (en]) | 1985-07-29 | 1985-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11515285U JPH0338835Y2 (en]) | 1985-07-29 | 1985-07-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6223447U JPS6223447U (en]) | 1987-02-13 |
| JPH0338835Y2 true JPH0338835Y2 (en]) | 1991-08-15 |
Family
ID=30998532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11515285U Expired JPH0338835Y2 (en]) | 1985-07-29 | 1985-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0338835Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006230837A (ja) * | 2005-02-28 | 2006-09-07 | Pentax Corp | 内視鏡の湾曲装置 |
| KR101246864B1 (ko) * | 2012-05-07 | 2013-04-02 | 엘아이지에이디피 주식회사 | 기판 척킹장치 |
-
1985
- 1985-07-29 JP JP11515285U patent/JPH0338835Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6223447U (en]) | 1987-02-13 |
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